Fabrication of integrated channel waveguides in polydimethylsiloxane (PDMS) using proton beam writing (PBVV): applications for fluorescence detection ln microfluidic channels

Fabrication of integrated channel waveguides in polydimethylsiloxane (PDMS) using proton beam writing (PBVV): applications for fluorescence detection ln microfluidic channels

著者名:

C. N. B. Udalagama ( National Univ. of Singapore, Singapore )
S. F. Chan ( National Univ. of Singapore, Singapore )
S. Homhuan ( National Univ. of Singapore, Singapore )
A. A. Bettiol ( National Univ. of Singapore, Singapore )
T. Wohland ( National Univ. of Singapore, Singapore )

掲載資料名:

Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6882

発行年:

2008

開始ページ:

68820D-1

終了ページ:

68820D-9

総ページ数:

9

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470577 [0819470570]

言語:

英語

請求記号:

P63600/6882

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052513
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining and Microfabrication Process Technology
回次:	2008 : 13th
会議開催地:	San Jose, California, USA
会議開催年:	2008.01.22-2008.01.23
論文注記:	Micromachining and microfabrication process technology XIII, 22-23 January 2008, San Jose, California, USA - Session 3. Etching and Lithography (68820D/6882-12)

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