Blank Cover Image

A novel fabrication technology for anti-reflex water-level vacuum packaged microscanning mirrors

著者名:
  • M. Oldsen ( Fraunhofer Institute for Silicon Technology, Germany )
  • U. Hofmann ( Fraunhofer Institute for Silicon Technology, Germany )
  • H. J. Quenzer ( Fraunhofer Institute for Silicon Technology, Germany )
  • J. Janes ( Fraunhofer Institute for Silicon Technology, Germany )
  • C. Stolte ( Fraunhofer Institute for Silicon Technology, Germany )
掲載資料名:
Micromachining and microfabrication process technology XIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6882
発行年:
2008
開始ページ:
688208-1
終了ページ:
688208-8
総ページ数:
8
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470577 [0819470570]
言語:
英語
請求記号:
P63600/6882
資料種別:
国際会議録

類似資料:

U. Hofmann, M. Oldsen, H.-J. Quenzer, J. Janes, M. Heller

Society of Photo-optical Instrumentation Engineers

J.-W. Choi, J.-M. Kang, J.-W. Kim, J.-H. Choi, D.-H. Kim

Society of Photo-optical Instrumentation Engineers

M. Oldsen, U. Hofmann, H.-J. Quenzer, W. Reinert, B. Wagner

Electrochemical Society

8 国際会議録 A novel microscanning device

Y. Zhou, C. Yang

Society of Photo-optical Instrumentation Engineers

Reimer,K., Quenzer,H.-J., Jurss,M., Wagner,B.

SPIE-The International Society for Optical Engineering

S. Garcia-Blanco, P. Topart, Y. Desroches, J. S. Caron, F. Williamson

Society of Photo-optical Instrumentation Engineers

Reimer,K., Hofmann,U., Jurss,M., Pulz,W., Quenzer,H.J., Wagner,B.

SPIE-The International Society for Optical Engineering

Kim,C.-H., Jeon,C.-U., Han,S.-J., Cho,W.-I., Choi,S.-W., Han,W.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering

Brubaker, C., Glinsner, T., Lindner, P., Schaefer, C., Tischler, M.

IMAPS

Richard Q. Song, Jane C. Li, Norman N. Li

American Institute of Chemical Engineers

Topart, P.A., Leclair, S., Alain, C., Jerominek, H.

SPIE - The International Society of Optical Engineering

Richard Q. Song, Jane C. Li, Norman N. Li

American Institute of Chemical Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12