Laser microfabrication in industry - perspectives from the past, present and future | 東京工業大学附属図書館文献データベース

Laser microfabrication in industry - perspectives from the past, present and future

著者名:: M. Gower ( Nanophoton Technologies, United Kingdom )
掲載資料名:: Photon processing in microelectronics and photonics VII : 21-24 January 2008, San Jose, California, USA
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 6879
発行年:: 2008
パート:: A
開始ページ:: 687902-1
終了ページ:: 687902-15
総ページ数:: 15
出版情報:: Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:: 0277786X
ISBN:: 9780819470546 [0819470546]
言語:: 英語
請求記号:: P63600/6879
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00052510
シリーズID:	PA00000029
会議名:	SPIE LASE : Photon Processing in Microelectronics and Photonics
回次:	2008 : 7th
会議開催地:	San Jose, California, USA
会議開催年:	2008.01.21-2008.01.24
論文注記:	Photon processing in microelectronics and photonics VII, 21-24 January 2008, San Jose, California, USA - Laser Processing - A 20-year Perspective-PART I, Part A. Laser applications in microelectronic and optoelectronic manufacturing XIII, Invited paper (687902/6879A-01)

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