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Design of maskless lithography system based on DMD

著者名:
  • J. Ma ( Xi'an Univ. of Technology, China )
  • X. Du ( Xi'an Univ. of Technology, China )
  • Y. Liu ( Xi'an Univ. of Technology, China )
掲載資料名:
MEMS/MOEMS technologies and applications III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6836
発行年:
2008
開始ページ:
683612-1
終了ページ:
683612-8
総ページ数:
8
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470119 [0819470112]
言語:
英語
請求記号:
P63600/6836
資料種別:
国際会議録

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