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A novel optical MEMS pressure sensor with a mesa diaphragm

著者名:
  • Y. Ge ( Nanjing Normal Univ., China )
  • M. Wang ( Nanjing Normal Univ., China )
  • H. Rong ( Nanjing Normal Univ., China )
  • X. Chen ( Nanjing Normal Univ., China )
掲載資料名:
MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6836
発行年:
2008
開始ページ:
68360R-1
終了ページ:
68360R-9
総ページ数:
9
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470119 [0819470112]
言語:
英語
請求記号:
P63600/6836
資料種別:
国際会議録

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