Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer

Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer

著者名:

L. Chen ( Beijing Institute of Technology, China )
D. Sha ( Beijing Institute of Technology, China )

掲載資料名:

Optical Design and Testing III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6834

発行年:

2008

巻:

2

開始ページ:

68342N-1

終了ページ:

68342N-9

総ページ数:

9

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470096 [0819470090]

言語:

英語

請求記号:

P63600/6834

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052465
シリーズID:	PA00000029
会議名:	Photonics Asia : Optical Design and Testing
回次:	2007 : 3rd
会議開催地:	Beijing, China
会議開催年:	2007.11.12-2007.11.15
論文注記:	Optical Design and Testing III, 12-15 November 2007, Beijing, China - Poster Session (68342N/6834-74)

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1 国際会議録 Research on the fiber point-diffraction interferometer for spherical figure measurement L. Chen, L. Nie, T. Zhou, D. Sha SPIE - The International Society of Optical Engineering	7 国際会議録 The simulation analysis of the scatterfield microscopy for the critical dimensions measurement L. Chen, D. Sha Society of Photo-optical Instrumentation Engineers
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3 国際会議録 Fiber point diffraction interferometer in measurement of spherical lens S. Wu, T. Zhou, J. Lin, L. Chen, L. Nie Society of Photo-optical Instrumentation Engineers	9 国際会議録 Design of laser source for fiber point diffraction interferometer X. Yu, L. Nie, J. Han, B. Liu, X. Jiang Society of Photo-optical Instrumentation Engineers
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6 国際会議録 Research of measurement assurance a program (MAP) for laser interferometer Feng, Y., Chen, L., Ren, J. R., Sha, D. SPIE-The International Society for Optical Engineering	12 国際会議録 Uncertainty evaluation of a fiber-based interferometer for the measurement of absolute dimensions [5879-03] Badami, V. G., Bialock, T. SPIE - The International Society of Optical Engineering

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