Effect of hydrogen dilution on photoluminescent properties of nanocrystalline SiC films deposited by helicon wave plasma CVD

Effect of hydrogen dilution on photoluminescent properties of nanocrystalline SiC films deposited by helicon wave plasma CVD

著者名:

W. Yu ( Hebei Univ., China )
J. Du ( Hebei Univ., China )
L. Zhang ( Hebei Univ., China )
S. Cui ( Hebei Univ., China )
L. Han ( Hebei Univ., China )

掲載資料名:

Light-emitting diode materials and devices II : 12-14 November 2007, Beijing, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6828

発行年:

2008

開始ページ:

682814-1

終了ページ:

682814-6

総ページ数:

6

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470034 [0819470031]

言語:

英語

請求記号:

P63600/6828

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052459
シリーズID:	PA00000029
会議名:	Photonics Asia : Light-Emitting Diode Materials and Devices
回次:	2007 : 2nd
会議開催地:	Beijing, China
会議開催年:	2007.11.12-2007.11.14
論文注記:	Light-emitting diode materials and devices II, 12-14 November 2007, Beijing, China - Session 9. Inorganic Materials and Applications (682814/6828-19)

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