Design and fabrication process of a micropump using bulk Pb(Zr,Ti)O3 for microfluidic devices
- 著者名:
- R. Sakamoto ( Ritsumeikan Univ., Japan )
- V. T. Dau ( Ritsumeikan Univ., Japan )
- D. V. Dao ( Ritsumeikan Univ., Japan )
- K. Tanaka ( Ritsumeikan Univ., Japan )
- S. Sugiyama ( Ritsumeikan Univ., Japan )
- 掲載資料名:
- Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6800
- 発行年:
- 2008
- 開始ページ:
- 680022-1
- 終了ページ:
- 680022-8
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819469717 [0819469718]
- 言語:
- 英語
- 請求記号:
- P63600/6800
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
Materials Research Society |
MRS - Materials Research Society |
8
国際会議録
Low-voltage drive electro-optic Pb(Zr,Ti)O3 Waveguide devices fabricated by solid-phase epitaxy
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
MRS - Materials Research Society |
Materials Research Society |
Electrochemical Society |
6
国際会議録
Integrated (Pb, La)(Zr, Ti)O3 heterostructure waveguide devices fabricated by solid-phase epitaxy
MRS-Materials Research Society |
Materials Research Society |