Effective area partitioning for preparing parallel processing in mask data preparation
- 著者名:
- Y. Satou ( TOOL Corp., Japan )
- Y. Okamoto ( TOOL Corp., Japan )
- M. Fujimoto ( TOOL Corp., Japan )
- H. Tsuchida ( TOOL Corp., Japan )
- A. Satou ( TOOL Corp., Japan )
- 掲載資料名:
- Photomask technology 2007
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6730
- 発行年:
- 2007
- 巻:
- 3
- 開始ページ:
- 67304C-1
- 終了ページ:
- 67304C-10
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819468871 [0819468878]
- 言語:
- 英語
- 請求記号:
- P63600/6730
- 資料種別:
- 国際会議録
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