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Improvement of mask CD uniformity for below 45-nm node technology

著者名:
  • H. Lee ( Samsung Electronics Co., Ltd., South Korea )
  • S. Bae ( Samsung Electronics Co., Ltd., South Korea )
  • J. Park ( Samsung Electronics Co., Ltd., South Korea )
  • D. Nam ( Samsung Electronics Co., Ltd., South Korea )
  • B. Kim ( Samsung Electronics Co., Ltd., South Korea )
掲載資料名:
Photomask technology 2007
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6730
発行年:
2007
巻:
2
開始ページ:
67302Z-1
終了ページ:
67302Z-7
総ページ数:
7
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468871 [0819468878]
言語:
英語
請求記号:
P63600/6730
資料種別:
国際会議録

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