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Application of SPM interferometry in MEMS vibration measurement

著者名:
  • C. Tang ( Chongqing Univ., China )
  • G. He ( Chongqing Univ., China )
  • C. Xu ( Chongqing Univ. of Posts and Telecommunications, China )
  • L. Zhao ( Chongqing Univ., China )
  • J. Hu ( Chongqing Univ., China )
掲載資料名:
Optical test and measurement technology and equipment
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6723
発行年:
2007
巻:
3
開始ページ:
67235P-1
終了ページ:
67235P-5
総ページ数:
5
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468802 [0819468800]
言語:
英語
請求記号:
P63600/6723
資料種別:
国際会議録

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