High accuracy measurements of objects with multiple reflective surfaces with wavelength shifting interferometry

High accuracy measurements of objects with multiple reflective surfaces with wavelength shifting interferometry

著者名:

S. Tang ( KLA-Tencor, USA )
R. E. Bills ( KLA-Tencor, USA )
K. Freischlad ( KLA-Tencor, USA )

掲載資料名:

Optical test and measurement technology and equipment

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6723

発行年:

2007

巻:

1

開始ページ:

67230F-1

終了ページ:

67230F-10

総ページ数:

10

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819468802 [0819468800]

言語:

英語

請求記号:

P63600/6723

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052369
シリーズID:	PA00000029
会議名:	International Symposium on Advanced Optical Manufacturing and Testing Technologies
回次:	2007 : 3rd
会議開催地:	Chengdu, China
会議開催年:	2007.07.08-2007.07.12
論文注記:	3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 8-12 July 2007, Chengdu, China - Session 3-3 (6723-14)

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