Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators
- 著者名:
- H. V. Le ( Vietnam National Univ. (Vietnam) )
- M. Gouiffes ( Institute d'Electronique Fondamentale (France) )
- F. Parrain ( Institute d'Electronique Fondamentale (France) )
- A. Bosseboeuf ( Institute d'Electronique Fondamentale (France) )
- B. Zavidovique ( Institute d'Electronique Fondamentale (France) )
- 掲載資料名:
- Applications of digital image processing XXX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6696
- 発行年:
- 2007
- 巻:
- 2
- 開始ページ:
- 66962D-1
- 終了ページ:
- 66962D-12
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819468444 [0819468444]
- 言語:
- 英語
- 請求記号:
- P63600/6696
- 資料種別:
- 国際会議録
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