Optical characteristic of ion beam sputter deposited aluminum thin films
- 著者名:
- W. Jin ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
- C. Jin ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
- H. Zhu ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
- L. Liu ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
- H. Yang ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
- 掲載資料名:
- International Symposium on Photoelectronic Detection and Imaging 2007, optoelectronic system design, manufacturing, and testing : 9-12 September 2007, Beijing China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6624
- 発行年:
- 2008
- 開始ページ:
- 66241B-1
- 終了ページ:
- 66241B-10
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819467669 [0819467669]
- 言語:
- 英語
- 請求記号:
- P63600/6624
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
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SPIE - The International Society of Optical Engineering |
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9
国際会議録
SiNx optical thin films prepared by RF ion-beam sputtering and residual stress elimination technique
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
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