Design and research of zoom optic system applied in micro-processing using 248nm KrF excimer laser

Design and research of zoom optic system applied in micro-processing using 248nm KrF excimer laser

著者名:

X. Liu ( Beijing Univ. of Technology (China) )
T. Chen ( Beijing Univ. of Technology (China) )
T. Zuo ( Beijing Univ. of Technology (China) )

掲載資料名:

International Symposium on Photoelectronic Detection and Imaging 2007, optoelectronic system design, manufacturing, and testing : 9-12 September 2007, Beijing China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6624

発行年:

2008

開始ページ:

66240I-1

終了ページ:

66240I-8

総ページ数:

8

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819467669 [0819467669]

言語:

英語

請求記号:

P63600/6624

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052304
シリーズID:	PA00000029
会議名:	International Symposium on Photoelectronic Detection and Imaging 2007
回次:	2007
会議開催地:	Beijing, China
会議開催年:	2007.09.09-2007.09.12
論文注記:	International Symposium on Photoelectronic Detection and Imaging 2007, 9-12 September 2007, Beijing, China (66240I)

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