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Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

著者名:
掲載資料名:
PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea
シリーズ名:
Materials science forum
シリーズ巻号:
561-565
発行年:
2007
巻:
561-565
パート:
2
開始ページ:
1177
終了ページ:
1180
総ページ数:
4
出版情報:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494620 [0878494626]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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