Blank Cover Image

Aluminum Alloy Formation and Impacts in Advanced Replacement Metal Gate Process

著者名:
K. Xu
Y. Wang
S.H. Shen
X. Xia
W.Ch. Tu
L. Karuppiah
H. Yang
Z. Ge
Y. Lei
M. Allen
N. Yoshida
L.W. Chang
B. Liu
M. Okazaki
A. Brand
さらに 10 件
掲載資料名:
Structural and chemical characterization of metals, alloys and compounds, 2011 : symposium held August 14-19, 2011, Cancún, Mexico
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1372
発行年:
2012
開始ページ:
107
終了ページ:
116
総ページ数:
10
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605113494 [1605113492]
言語:
英語
請求記号:
M23500/1372
資料種別:
国際会議録

類似資料:

1 国際会議録 Distributed monitoring architecture for movable objects over the GSM system

Chen,J.-F., Lin,W.Ch., Chung,C.M., Tsai,K.H., Chang,C.H., Hu,W.Ch.

SPIE-The International Society for Optical Engineering
7 国際会議録 Evaluation of impacts of ecological water conveyances on hydrological processes and land cover in Tarim River basin, China, using groundwater levels and MODIS …

Q. Shen, J. Xu, Y. Lei

Society of Photo-optical Instrumentation Engineers
2 国際会議録 COMPOUND FORMATION AND SILICON BEHAVIOR IN TITANIUM AND TANTALUM LAYERED ALUMINUM FILMS

Shen, B.W., Anthony, J.M., Chang, P.-H., Keenan, J., Matyi, R., Tsai, H.L.

Materials Research Society
8 国際会議録 Impact of Positive Charges on NBTI Degradation and Characterization in Ultra-Thin SiON Gate Dielectrics

J. Lei, M. Xu

Electrochemical Society
3 国際会議録 Weldability Studies on the Replacement Repair Welded Joints of a Damaged Steel Bridge

K.H. Chang, H.C. Park, C.H. Lee, G.C. Jang, S.H. Lee

Trans Tech Publications
9 国際会議録 Dynamic MTW: a dynamic bandwidth distribution scheme in EPON

Chen, H., Ge, L.W., Zeng, L.G.

SPIE-The International Society for Optical Engineering
4 国際会議録 Performance Impact of silicided Source/Drain/Gate on Deep Submicron CMOS Circuits

L.K. Wang, W.H. Chang, T. Lii

Electrochemical Society
10 国際会議録 Low Temperature Grown Thin InAlAs Step Graded Buffers for Application on Optical Modulator at 1.3 ｦﾌm

Shen, Lei, Wieder, H. H., Chang, W. S. C.

MRS - Materials Research Society
5 国際会議録 The self similar pulse formation study of mode-locked fibre lasers

C. Tu, T. Lei, W. Guo, D. Wei, H. Zhu

Society of Photo-optical Instrumentation Engineers
11 国際会議録 Impact and characterization of mask repair on wafer CD uniformity

Chang,H.M., Shieh,W.B., Liu,J., Chu,B., Tu,L.H., Cheng,J., Wang,D., Hentschel,S.L., Hsu,V.

SPIE-The International Society for Optical Engineering
6 国際会議録 The Vertical Replacement-Gate (VRG) MOSFET: A High-Performance, Vertical MOSFET with Lithography-Independent Critical Dimensions

Hergenrother, J.M., Oh, S.H., Nigam, T., Monroe, D., Klemens, F.P., Kornblit, A., Baumann, F.H., Grazul, J.L., Johnson, …

Electrochemical Society
12 国際会議録 46 Novel Dual Metal Gate Technology Using Mo-MoSix for Advanced MOS Device Applications

Li, T.-Z., Ho, W.-L., Wang, H. C-. H., Chang, C.-Y.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12