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Comparison of TiN Thin Films Grown on SiO2 by Reactive dc Magnetron Sputtering and High Power Impulse Magnetron Sputtering

著者名:
掲載資料名:
Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1335
発行年:
2012
開始ページ:
93
終了ページ:
98
総ページ数:
6
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605113128 [1605113123]
言語:
英語
請求記号:
M23500/1335
資料種別:
国際会議録

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