Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering
- 著者名:
F. Magnus B. Agnarsson A.S. Ingason K. Leosson S. Olafsson J.T. Gudmundsson - 掲載資料名:
- Titanium dioxide nanomaterials : symposium held April 25-29, 2011, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 1352
- 発行年:
- 2012
- 開始ページ:
- 39
- 終了ページ:
- 46
- 総ページ数:
- 8
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605113296 [1605113298]
- 言語:
- 英語
- 請求記号:
- M23500/1352
- 資料種別:
- 国際会議録
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10
国際会議録
ION BOMBARDMENT EFFECTS ON THE GROWTH OF RUTILE PHASE OF REACTIVELY SPUTTERED TiO2 THIN FILMS
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