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High Yield Polymer MEMS Process for CMOS/MEMS Integration

著者名:
掲載資料名:
Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1299
発行年:
2011
巻:
1299
開始ページ:
91
終了ページ:
96
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112763 [1605112763]
言語:
英語
請求記号:
M23500/1299
資料種別:
国際会議録

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