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Reliability and Stability of Thin-Film Amorphous Silicon MEMS on Glass Substrates

著者名:
掲載資料名:
Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1299
発行年:
2011
開始ページ:
85
終了ページ:
90
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112763 [1605112763]
言語:
英語
請求記号:
M23500/1299
資料種別:
国際会議録

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