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Effect of Humidity on Dielectric Charging Process in Electrostatic Capacitive RF MEMS Switches Based on Kelvin Probe Force Microscopy Surface Potential Measurements

著者名:
掲載資料名:
Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1222
発行年:
2010
開始ページ:
39
終了ページ:
44
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111957 [1605111953]
言語:
英語
請求記号:
M23500/1222
資料種別:
国際会議録

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