Distribution of Hydrogen- and Vacancy-Related Donor and Acceptor States in Helium-Implanted and Plasma-Hydrogenated Float-Zone Silicon

Distribution of Hydrogen- and Vacancy-Related Donor and Acceptor States in Helium-Implanted and Plasma-Hydrogenated Float-Zone Silicon

著者名:

掲載資料名:

Reliability and materials issues of semiconductor optical and electrical devices and materials : symposium held November 29 - December 3, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1195

発行年:

2010

開始ページ:

291

終了ページ:

298

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605111681 [1605111686]

言語:

英語

請求記号:

M23500/1195

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00050318
シリーズID:	PA00000011
会議名:	MRS Fall Meeting
回次:	2009
会議開催地:	Boston, Massachusetts, USA
会議開催年:	2009.11.30-2009.12.03

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2 国際会議録 Formation and Annihilation of Hydrogen Related Donor States in Proton Implanted and Subsequently Plasma Hydrogenated N-Type Float Zone Silicon R. Job, F. Niedernostheide, H. Schulze Electrochemical Society	8 国際会議録 Void Formation in Hydrogen Implanted and Subsequently Plasma Hydrogenated and Annealed Czochralski Silicon Job, R., Dungen, W., Ma, Y., Huang, Y.L., Horstmann, J.T. Materials Research Society
3 国際会議録 Formation of Hydrogen Related Defects and Nano-Voids in Plasma Hydrogenated ZnO Reinhart Job Materials Research Society	9 国際会議録 Hydrogen Gettering and Platelet Formation in Implanted and Hydrogenated Silicon A. Job, W. Düngen, Y. Ma, W. R. Fahrner, L. O. Keller, J. T. Horstmann, H. Fiedler Electrochemical Society
4 国際会議録 Doping Of Oxidized Float Zone Silicon By Thermal Donors - A Low Thermal Budget Doping Method For Device Applications? Job, R., Ulyashin, A.G., Huang, Y.L., Fahrner, W.R., Simoen, E., Claeys, C., Niedernostheide, F.-J., Schulze, H.-J., … Materials Research Society	10 国際会議録 A Low Temperature Technology on the Base of Hydrogen Enhanced Thermal Donor Formation for Future High-Voltage Applications Job, R., Ulyashin, A.G., Fahrner, W.R., Niedernostheide, F.J., Schulze, H.J., Simoen, E., Claeys, C.L., Tonelli, G. SPIE-The International Society for Optical Engineering
5 国際会議録 The Impact of Hydrogen Plasma Treatments at Moderate Temperatures on Sintered Zinc Oxide Samples - Evidence for Hydrogen Induced Nano-Void Formation Reinhart Job Materials Research Society	11 国際会議録 Comparison of Oxygen and Hydrogen Gettering at High-Temperature Postimplantation Annealing of Hydrogen- and Helium-Implanted Czochralski Silicon Job, R., Fahrner, W. R., Ivanov, A. I., Palmetshofer, L., Ulyashin, A. G. MRS - Materials Research Society
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