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Methods to Measure Mechanical Properties of NEMS and MEMS: Challenges and Pitfalls

著者名:
掲載資料名:
Probing mechanics at nanoscale dimensions : symposium held April 14-17, 2009, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1185
発行年:
2009
開始ページ:
21
終了ページ:
32
総ページ数:
12
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111582 [1605111589]
言語:
英語
請求記号:
M23500/1185
資料種別:
国際会議録

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