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An Adherent Nano-superhard TiN Film Synthesized by a Vacuum Cathode Multi-arc Ion-plated System

著者名:
  • X. Yu ( China University of Geosciences, Beijing, People's Republic of China )
  • Y. Liu ( Beijing Powertech Co. Ltd., Beijing, People's Republic of China )
  • C.B. Wang ( China University of Geosciences, Beijing, People's Republic of China )
  • D.Y. Yu ( Beijing Powertech Co. Ltd., Beijing, People's Republic of China )
掲載資料名:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
49
発行年:
2006
開始ページ:
538
終了ページ:
543
総ページ数:
6
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/49
資料種別:
国際会議録

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