High Power RF and MF Systems for Flat Panel Display Applications
- 著者名:
- D. Ochs ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
- T. Rettich ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
- 掲載資料名:
- 49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 49
- 発行年:
- 2006
- 開始ページ:
- 197
- 終了ページ:
- 200
- 総ページ数:
- 4
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/49
- 資料種別:
- 国際会議録
類似資料:
Society of Vacuum Coaters |
Society of Vacuum Coaters |
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters | |
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
11
国際会議録
Comparison of Mid Frequency and Bipolar Pulsed DC Power Supplies for Dual Magnetron Sputtering
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |