Robust System Identification and Optimized Tuning for Control of Evaporation Processes

Robust System Identification and Optimized Tuning for Control of Evaporation Processes

著者名:

G. Reimann ( Cyber Materials LLC, Auburndale, MA )
M. Gevelber ( Cyber Materials LLC, Auburndale, MA )
B. Vattiat ( Cyber Materials LLC, Auburndale, MA )
J. Hildebrand ( Maxtek Inc., Santa Fe Springs, CA )
C. Hildebrand ( Maxtek Inc., Santa Fe Springs, CA )

掲載資料名:

48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

48

発行年:

2005

開始ページ:

697

終了ページ:

702

総ページ数:

6

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/48

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049386
シリーズID:	PA00000013
会議名:	Society of Vacuum Coaters. Annual technical conference
回次:	2005 : 48th
会議開催地:	Denver, Colorado USA
会議開催年:	2005.04.23-2005.04.28

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