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Real-Time Growth Studies on the Expanding Thermal Plasma Deposited ZnO Films by Means of In Situ Spectroscopic Ellipsometry

著者名:
  • I.Volintiru ( Eindhoven University of Technology, Department of Applied Physics, Eindhoven, The Netherlands )
  • M. Creatore ( Eindhoven University of Technology, Department of Applied Physics, Eindhoven, The Netherlands )
  • J.L. Linden ( TNO Science and Industry, Eindhoven, The Netherlands )
  • M.C.M. van de Sanden ( Eindhoven University of Technology, Department of Applied Physics, Eindhoven, The Netherlands )
掲載資料名:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
48
発行年:
2005
開始ページ:
534
終了ページ:
539
総ページ数:
6
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/48
資料種別:
国際会議録

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