Materials Processing in Electron Beam-Generated Plasmas

著者名:

• C. Muratore ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• S.G. Walton ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• D. Leonhardt ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• R.F. Fernsler ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )
• R.A. Meger ( Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC )

掲載資料名:

47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

47

発行年:

2004

開始ページ:

412

終了ページ:

417

総ページ数:

6

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/47

資料種別:

国際会議録