A Study of an Ionized Magnetron Source by Pulsed Absorption Spectroscopy
- 著者名:
S. Konstantinidis ( Université de Mons-Hainaut, Mons, Belgium ) A. Ricard ( Université Paul Sabatier, Toulouse, France ) M. Ganciu-Petcu ( National Institute for Laser, Plasma and Radiation Physics, Bucharest, Romania ) J.-P. Dauchot ( Université de Mons-Hainaut, Mons, Belgium ) M. Wautelet ( Université de Mons-Hainaut, Mons, Belgium ) M. Hecq ( Université de Mons-Hainaut, Mons, Belgium ) - 掲載資料名:
- 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 46
- 発行年:
- 2003
- 開始ページ:
- 452
- 終了ページ:
- 456
- 総ページ数:
- 5
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/46
- 資料種別:
- 国際会議録
類似資料:
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
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Kluwer Academic Publishers |
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6
国際会議録
Deposition Flux Characteristics near the Substrate in High Power Impulse Magnetron Sputtering
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Elsevier |