Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control
- 著者名:
J.N. Hilfiker ( J.A. Woollam Company, Lincoln, NE ) B. Johs ( J.A. Woollam Company, Lincoln, NE ) J. Hale ( J.A. Woollam Company, Lincoln, NE ) C.M. Herzinger ( J.A. Woollam Company, Lincoln, NE ) T.E. Tiwald ( J.A. Woollam Company, Lincoln, NE ) C.L. Bungay ( J.A. Woollam Company, Lincoln, NE ) R.A. Synowicki ( J.A. Woollam Company, Lincoln, NE ) G.K. Pribil ( J.A. Woollam Company, Lincoln, NE ) J.A. Woollam ( J.A. Woollam Company, Lincoln, NE ) - 掲載資料名:
- 46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 46
- 発行年:
- 2003
- 開始ページ:
- 365
- 終了ページ:
- 370
- 総ページ数:
- 6
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/46
- 資料種別:
- 国際会議録
類似資料:
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
国際会議録
Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |