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Correlation Between Optical and Mass Spectrometry Characterization of an Atomic Nitrogen Source for Reactive Magnetron Sputtering

著者名:
  • T. Godfroid ( Universite de Mons-Hainaut, Mons, Belgium )
  • J.-P. Dauchot ( Universite de Mons-Hainaut, Mons, Belgium )
  • M. Hecq ( Universite de Mons-Hainaut, Mons, Belgium )
掲載資料名:
46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
46
発行年:
2003
開始ページ:
108
終了ページ:
113
総ページ数:
6
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/46
資料種別:
国際会議録

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