Plasma Processing System Based on Electron Beam Ionization
- 著者名:
D. Leonhardt ( Naval Research Laboratory, Plasma Physics Division, Washington, DC ) M.M. Balkey ( Naval Research Laboratory, Plasma Physics Division, Washington, DC ) R.F. Fernsler ( Naval Research Laboratory, Plasma Physics Division, Washington, DC ) R.A. Meger ( Naval Research Laboratory, Plasma Physics Division, Washington, DC ) D.P. Murphy ( Naval Research Laboratory, Plasma Physics Division, Washington, DC ) S.G. Walton ( SFA, Inc., Largo, MD ) D.D. Blackwell ( SFA, Inc., Largo, MD ) - 掲載資料名:
- 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 45
- 発行年:
- 2002
- 開始ページ:
- 354
- 終了ページ:
- 359
- 総ページ数:
- 6
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/45
- 資料種別:
- 国際会議録
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4
国際会議録
Diagnostics and Processing Applications of Electron Beam-Generated Plasmas Produced in Nitrogen
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