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Study of the Reactivity of Tin and Titanium During the Synthesis of SnOx and TiOx Thin Films by DC Magnetron Reactive Sputtering

著者名:
  • R. Snyders ( Mons-Hainaut University, Mons, Belgium )
  • M. Wautelet ( Mons-Hainaut University, Mons, Belgium )
  • R. Gouttebaron ( Mons-Hainaut University, Mons, Belgium )
  • J.P. Dauchot ( Mons-Hainaut University, Mons, Belgium )
  • M. Hecq ( Mons-Hainaut University, Mons, Belgium )
掲載資料名:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
45
発行年:
2002
巻:
45
開始ページ:
323
終了ページ:
327
総ページ数:
5
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/45
資料種別:
国際会議録

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