Optical Monitoring of Thin Films Using Spectroscopic Ellipsometry
- 著者名:
- D.E. Morton ( Denton Vacuum, LLC, Moorestown, NJ )
- B. Johs ( JA. Woollam Co., Inc., Lincoln, NE )
- J. Hale ( JA. Woollam Co., Inc., Lincoln, NE )
- 掲載資料名:
- 45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 45
- 発行年:
- 2002
- 開始ページ:
- 299
- 終了ページ:
- 305
- 総ページ数:
- 7
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/45
- 資料種別:
- 国際会議録
類似資料:
Society of Vacuum Coaters |
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
8
国際会議録
Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
MRS-Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |