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Optical Monitoring of Thin Films Using Spectroscopic Ellipsometry

著者名:
  • D.E. Morton ( Denton Vacuum, LLC, Moorestown, NJ )
  • B. Johs ( JA. Woollam Co., Inc., Lincoln, NE )
  • J. Hale ( JA. Woollam Co., Inc., Lincoln, NE )
掲載資料名:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
45
発行年:
2002
開始ページ:
299
終了ページ:
305
総ページ数:
7
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/45
資料種別:
国際会議録

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