Experience with High Power DC Supplies with Fast Arc Suppression in Large Area Coating

Experience with High Power DC Supplies with Fast Arc Suppression in Large Area Coating

著者名:

F. Milde ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
D. Schulze ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
G. Teschner ( Von Ardenne Anlagentechnik GmbH, Dresden, Germany )
P. Wiedemuth ( Hüttinger Elektronik GmbH, Freiburg, Germany )
T. Rettich ( Hüttinger Elektronik GmbH, Freiburg, Germany )

掲載資料名:

44th Annual Technical Conference proceedings, April 21-26, 2001, Philadelphia, Pennsylvania

シリーズ名:

Annual Technical Conference of Society of Vacuum Coaters

シリーズ巻号:

44

発行年:

2001

開始ページ:

375

終了ページ:

381

総ページ数:

7

出版情報:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

言語:

英語

請求記号:

A63930/44

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049382
シリーズID:	PA00000013
会議名:	Annual Technical Conference Proceedings
回次:	2001
会議開催地:	Philadelphia, Pennsylvania USA
会議開催年:	2001.04.21-2001.04.26

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