Surfaces and Interfaces for Controlled Defect Engineering
- 著者名:
- Edmund G. Seebauer
- 掲載資料名:
- Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 1070
- 発行年:
- 2008
- 開始ページ:
- 25
- 終了ページ:
- 34
- 総ページ数:
- 10
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605110400 [160511040X]
- 言語:
- 英語
- 請求記号:
- M23500/1070
- 資料種別:
- 国際会議録
類似資料:
|
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
|
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
|
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
|
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
|
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
|
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
