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Stress Mapping of SiC Wafers by Synchrotron White Beam X-ray Reticulography

著者名:
掲載資料名:
Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1069
発行年:
2008
巻:
1069
開始ページ:
95
終了ページ:
100
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605110394 [1605110396]
言語:
英語
請求記号:
M23500/1069
資料種別:
国際会議録

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