Studies of c-Axis Threading Screw Dislocations in Hexagonal SiC

Studies of c-Axis Threading Screw Dislocations in Hexagonal SiC

著者名:

Yi Chen

掲載資料名:

Silicon Carbide 2008--materials, processing and devices : symposium held March 25-27, 2008, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1069

発行年:

2008

開始ページ:

45

終了ページ:

52

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605110394 [1605110396]

言語:

英語

請求記号:

M23500/1069

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00049372
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2008
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2008.05.25-2008.05.27

類似資料:

1 国際会議録 Multiplication of Basal Plane Dislocations via Interaction With c-Axis Threading Dislocations in 4H-SiC Yi Chen, Govindhan Dhanaraj, Michael Dudley, Hui Zhang, Ronghui Ma, Yevgeniy Shishkin, Stephen E. Saddow Materials Research Society	7 国際会議録 PVT Growth of 6H SiC Crystals and Defect Characterization Dhanaraj, Govindhan, Liu, Feng, Dudley, Michael, Zhang, Hui, Prasad, Vish Materials Research Society
2 国際会議録 Stress Mapping of SiC Wafers by Synchrotron White Beam X-ray Reticulography Ning Zhang, Yi Chen, Edward Sanchez, Michael F MacMillan, Michael Dudley Materials Research Society	8 国際会議録 Studies of the Distribution of Elementary Threading Screw Dislocations in 4H Silicon Carbide Wafer Y. Chen, N. Zhang, X.R. Huang, D.R. Black, M. Dudley Trans Tech Publications
3 国際会議録 Determination of the Core-structure of Shockley Partial Dislocations in 4H-SiC Yi Chen, Ning Zhang, Xianrong Huang, Joshua D Caldwell, Kendrick X Liu, Robert E Stahlbush, Michael Dudley Materials Research Society	9 国際会議録 Characterization of SiC Epilayers Using High-Resolution X-ray Diffraction and Synchrotron Topography Imaging Huang, Xianrong, Dudley, Michael, Okojie, Robert S. Materials Research Society
4 国際会議録 Sense Determination of c-Axis Screw Dislocations in 4H-SiC Y. Chen, X.R. Huang, G. Dhanaraj, M. Dudley, E.K. Sanchez Trans Tech Publications	10 国際会議録 Nucleation of c-Axis Screw Dislocations at Substrate Surface Damage during 4H-Silicon Carbide Homo-Epitaxy M. Dudley, N. Zhang, Y. Zhang, B. Raghothamachar, E.K. Sanchez Trans Tech Publications
5 国際会議録 Growth Mechanism and Dislocation Characterization of Silicon Carbide Epitaxial Films Govindhan Dhanaraj, Yi Chen, Hui Chen, William M. Vetter, Hui Zhang, Michael Dudley Materials Research Society	11 国際会議録 Growth and Surface Morphologies of 6H SiC Bulk and Epitaxial Crystals Dhanaraj, G., Chen, Y., Dudley, M., Zhang, H. Trans Tech Publications
6 国際会議録 Chemical Vapor Deposition and Defect Characterization of Silicon Carbide Epitaxial Films Chen, Yi, Dhanaraj, Govindhan, Chen, Hui, Vetter, Willaim, Dudley, Michael, Zhang, Hui Materials Research Society	12 国際会議録 Process-Induced Deformations and Stacking Faults in 4H-SiC Robert S. Okojie, Xianrong Huang, Michael Dudley, Ming Zhang, Pirouz Pirouz Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12