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Dynamic Maskless Holographic Lithography

著者名:
掲載資料名:
19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- and Nanosystems; and 9th International Conference on Advanced Vehicle Tire Technologies, Parts A and B; Volume 3
シリーズ名:
ASME Symposia Volumes
シリーズ巻号:
DETC 2007(3B)
発行年:
2007
巻:
3B
ペーパー番号:
DETC2007-35164
開始ページ:
977
終了ページ:
984
総ページ数:
8
出版情報:
New York, N.Y.: American Society of Mechanical Engineers
ISBN:
9780791848043 [0791848043]
言語:
英語
請求記号:
A11633/2007
資料種別:
国際会議録

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