Analysis of PD AOI pMOSFET Device Performance Enhancement due to Direct-Tunneling Current in the Partial n+ Poly Gate
- 著者名:
G. Guegan J. Pretet R. Gwoziecki O. Gonnard G. Gouget P. Touret C. Raynaud S. Deleonibus - 掲載資料名:
- Silicon-on-insulator technology and devices 13
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 6(4)
- 発行年:
- 2007
- 開始ページ:
- 165
- 終了ページ:
- 172
- 総ページ数:
- 8
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775533 [1566775531]
- 言語:
- 英語
- 請求記号:
- E23400/6-4
- 資料種別:
- 国際会議録
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11
国際会議録
Enhanced Degradation in P+-Poly PMOSFETs With Oxynitride Gate Dielectrics Under Hot-Hole Injection
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