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Influence of Oxide Breakdown Percolation Resistance on MOSFETS

著者名:
掲載資料名:
Silicon nitride, silicon dioxide, and emerging dielectrics 9
シリーズ名:
ECS transactions
シリーズ巻号:
6(3)
発行年:
2007
開始ページ:
431
終了ページ:
448
総ページ数:
18
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775526 [1566775523]
言語:
英語
請求記号:
E23400/6-3
資料種別:
国際会議録

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