Low Temperature GaN Epitaxy Using Ga(mDTC)3 Precursor
- 著者名:
C. Park D. Kim D. Yoon W. Jung H. Joo F. Umme - 掲載資料名:
- State-of-the-art program on compound semiconductors 46 (SOTAPOCS 46) and processes at the semiconductor/solution interface 2
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 6(2)
- 発行年:
- 2007
- 開始ページ:
- 235
- 終了ページ:
- 238
- 総ページ数:
- 4
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775519 [1566775515]
- 言語:
- 英語
- 請求記号:
- E23400/6-2
- 資料種別:
- 国際会議録
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