Reduced Parameter Fluctuation with Laser and Flash Lamp Anneal for 65nm Volume Production
- 著者名:
T. Feudel B. Bayha G. Burbach M. Gerhardt L. Herrmann M. Herden T. Mantei E. Ehrichs M. Greenlaw M. Horstmann - 掲載資料名:
- Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 6(1)
- 発行年:
- 2007
- 開始ページ:
- 373
- 終了ページ:
- 380
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775502 [1566775507]
- 言語:
- 英語
- 請求記号:
- E23400/6-1
- 資料種別:
- 国際会議録
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