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Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals

著者名:
N. Inoue
A. Karen
H. Yagi
K. Masumoto
M. Shinomiya
K. Kashima
K. Eifuku
M. Koizumi
T. Takahashi
T. Takenawa
K. Shingu
さらに 6 件
掲載資料名:
Silicon materials science and technology X
シリーズ名:
ECS transactions
シリーズ巻号:
2(2)
発行年:
2006
開始ページ:
453
終了ページ:
460
総ページ数:
8
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774390 [156677439X]
言語:
英語
請求記号:
E23400/2-2
資料種別:
国際会議録

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