ECR-CVD SiNX Passivation in GaAs-based MISFET Devices
類似資料:
Electrochemical Society |
Electrochemical Society |
2
国際会議録
One-step silicon nitride passivation by ECR-CVD for heterostructure transistors and MIS devices
Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |