Development of Electrochemical Mechanical Polishing for Advanced Copper Planarization
- 著者名:
R. Jia Y. Wang Z. Wang S. Tsai J. Dma D. Mao L. Karuppiah L. Chen - 掲載資料名:
- Copper interconnects, new contact and barrier metallurgies/structures, and low-k interlevel dielectrics III : at the 208th ECS meeting, October 16-21, 2005, Los Angeles, California, USA
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 1(11)
- 発行年:
- 2006
- 開始ページ:
- 125
- 終了ページ:
- 134
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774994 [1566774993]
- 言語:
- 英語
- 請求記号:
- E23400/1-11
- 資料種別:
- 国際会議録
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9
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Electrochemical Interaction Between Copper and Barrier Materials Using Chemical Mechanical Polishing
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