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Low-k SiBN (Silicon Boron Nitride) Film Synthesized by a Plasma-Assisted Atomic Layer Deposition

著者名:
S. Yang
J. Kim
J. Noh
H. Kim
S. Lee
J. Ahn
K. Hwang
Y. Shin
U. Chung
J. Moon
D. Lee
I. Yi
R. Jung
S. Kang
さらに 9 件
掲載資料名:
Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA
シリーズ名:
ECS transactions
シリーズ巻号:
1(10)
発行年:
2006
開始ページ:
79
終了ページ:
94
総ページ数:
16
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774437 [1566774438]
言語:
英語
請求記号:
E23400/1-10
資料種別:
国際会議録

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