Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

Electrochemical Testing of Tantalum and Copper in Chemical Mechanical Polishing Slurries

著者名:

掲載資料名:

Corrosion and electrochemistry of advanced materials, in Honor of Koji Hashimoto

シリーズ名:

ECS transactions

シリーズ巻号:

1(4)

発行年:

2006

開始ページ:

465

終了ページ:

478

総ページ数:

14

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566774970 [1566774977]

言語:

英語

請求記号:

E23400/1-4

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00047098
シリーズID:	PA00000034
会議名:	Symposium on Corrosion and Electrochemistry of Advanced Materials ; Meeting of the Electrochemical Society
回次:	2005 ; 208th
会議開催地:	Los Angeles, CA, USA
会議開催年:	2005.10.17-2005.10.19

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