EFFECT OF CORROSION INHIBITOR, lH-BENZOTRJAZOLE (BTAH) ON PARTICLE ADHESION IN Cu CMP
- 著者名:
J.-H. Song Y.-K. Hong T.-G. Kim Y.-J. Kang I.-K. Kim J.-H. Han J.-G. Park A. A. Busnaina - 掲載資料名:
- Cleaning Technology in Semiconductor Device Manufacturing IX
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 1(3)
- 発行年:
- 2006
- 開始ページ:
- 341
- 終了ページ:
- 348
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566774291 [1566774292]
- 言語:
- 英語
- 請求記号:
- E23400/1-3
- 資料種別:
- 国際会議録
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2
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